Encoder Scanhead-ET Series

Adopting grating technology, it features high repetition accuracy.

With stable and reliable performance, it delivers ultra-low and consistent temperature drift while meeting high-precision requirements.

The optional new NCL2 protocol enables the scanhead to “communicate actively”.

This protocol can output 27 items of status data in 4 major categories of the scanhead in real time.

Aperture size:20、30mm.

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Product Detail

Cooling Condition
Cooling Medium	Distilled or de-ionized water plus corrosion inhibitor
Temperature(℃)	22-28
Recommended cooling pressure	2-3
Recommended flow rate(l/min)	4-6

Optical Specifications
Type	ET 20		ET 30
Aperture Size(mm)	20		30
Available Wavelength(nm）	10600 / 1064 / 9300 532 / 355		10600 / 1064 / 9300 532 / 355
Optical Surface	Si	QU	Si
1% Step response time（general mode)	<560μs	<660μs	<980μs
Tracking error（general mode)	<340μs	<400μs	<620μs
Speed limit1	Max 100rad/s	Max 80rad/s	Max 70rad/s
Repeatability	<0.001mrad	<0.001mrad	<0.001mrad
Temperature drift²(m/s)	≤0.1mrad	≤0.1mrad	≤0.1mrad
1) Calculated based on optical angle, under general debugging mode. 2）For 8-hour continuous operation, calculated based on mechanical angle, under 24℃ water-cooling condition.